![sti divot formation](https://host.easylife.tw/files/RiotIsolator.png)
IncreasingtheetchrateoftheSTIdielectricresultedinatendencytocauseSTIdivotsandincreaseddivotsize....STIdivotformationinaccordancewiththe ...,2013年7月17日—IntheSTItechnique,atrenchsurroundingasemiconductordevicesuchasatransistorisetchedintoasemico...
Method for protecting STI structures with low etching rate ...
- shallow trench isolation半導體
- hump effect
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- deep trench isolation process
- 淺溝槽隔離
- 淺溝渠隔離
- shallow trench isolation半導體
- shallow trench isolation半導體
- locos製程
- usg半導體
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- sti etch back
- ild半導體
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- sti divot formation
- shallow trench isolation process flow
- locos製程
- 屏蔽氧化層
- sti淺溝槽
- shallow trench isolation oxide thickness leakage
- pad oxide半導體
- sti usg
Amethodformanufacturingshallowtrenchisolation(STI)structuresinsemiconductordevicemanufacturingincludingamethodforminimizingdivotformation ...
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